Simulation results are experimentally verified with 19 different fabricated structures where a spectral agreement is achieved with an absolute root-mean-square (RMS) error less than 5.4% within the subwavelength (SW) regime, proving the effectiveness of the proposed hybrid technique. The transmission performance of gratings is simulated with a hybrid simulation technique based on the modification of the reflection term within the Fresnel transmission equation, which combines both numerical and analytical approaches in a unique way for the first time in literature. Both pillar and groove type gratings are designed with various topological configurations changing in various period sizes (Λ) from 1.0 μm to 2.0 μm, various heights/depths (h) from 0.8 μm to 1.8 μm, and various pillar/groove width-to-period (w/Λ) ratios from 0.6 to 1.0. Deep-depleted silicon sensors can provide a QE of >90% between 700 – 850 nm in comparison to >60% with traditional silicon sensors, as shown in Figure 2.This paper presents a detailed comparison between the long wave infrared (LWIR) transmission performances of binary, silicon based, structurally complementary pillar and groove type antireflective gratings that can be used for wafer level vacuum packaging (WLVP) of uncooled microbolometer detectors. The penetration depth of NIR light within silicon is deeper than a typical silicon sensor, so without deep-depletion the silicon sensor is effectively transparent to the incident NIR light. The wavelength of incoming light and photon absorption depth are directly related the shorter the wavelength, the shorter the penetration depth into the silicon.ĭeep-depleted silicon sensors are thickerthan traditional silicon sensors so are able to detect longer wavelength light (i.e. Energy greater than the band gap energy is required to break these bonds to create an electron/hole pair (~1.1 eV).

In the high-purity crystalline form, neighboring silicon atoms are covalently bonded to one another. As QE is material dependent, it is important to look at the properties of this element and how it interacts with light.

Majority of scientific sensors are made of silicon.

Silicon cut off wavelength